Plasma electronics : [Book] : applications in microelectronic device fabrication / Toshiaki Makabe, Zoran Lj. Petrovic.

By:

Makabe, T. (Toshiaki) [author.]

Contributor(s):

Petrovic, Z [author.]

Material type: Text

TextEdition: Second editionDescription: xxxv, 376 pages : illustrations ; 24 cmISBN:

9781482222050

Subject(s):

Plasma engineering

DDC classification:

621.044

Other classification:

621.044

Summary: The book provides an up-to-date discussion of MEMS fabrication and phase transition between capacitive and inductive modes in an inductively coupled plasma. In addition to new sections on the phase transition between the capacitive and inductive modes in an ICP and MOS-transistor and MEMS fabrications, the book presents a new discussion of heat transfer and heating of the media and the reactor.

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Holdings
Item type	Current library	Call number	Status	Date due	Barcode	Item holds
Books	Junaid Zaidi Library, COMSATS University Islamabad Ground Floor	621.044 MAK-P (Browse shelf(Opens below))	Available		52172

Total holds: 0

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Previous	621.042 WIN Wind energy generation modelling and control /	621.044 ADV Advanced plasma technology	621.044 GRI-C 63254 Cold plasma in materials fabrication : from fundamentals to applications /	621.044 MAK-P Plasma electronics : applications in microelectronic device fabrication /	621.08 PAU-M Mechanical sciences. engineering thermodynamics and fluid mechanics /	621.08 PAU-M Mechanical sciences. engineering thermodynamics and fluid mechanics /	621.08 PAU-M Mechanical sciences. engineering thermodynamics and fluid mechanics /	Next

The book provides an up-to-date discussion of MEMS fabrication and phase transition between capacitive and inductive modes in an inductively coupled plasma. In addition to new sections on the phase transition between the capacitive and inductive modes in an ICP and MOS-transistor and MEMS fabrications, the book presents a new discussion of heat transfer and heating of the media and the reactor.

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