Plasma electronics : (Record no. 71666)

MARC details
000 -LEADER
fixed length control field 01189cam a2200217 i 4500
001 - CONTROL NUMBER
control field 0000067507
003 - CONTROL NUMBER IDENTIFIER
control field 0001
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 150714s2015 flua b 001 0 eng c
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 9781482222050
082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 621.044
084 ## - OTHER CLASSIFICATION NUMBER
Classification number 621.044
Item number MAK-P
100 1# - MAIN ENTRY--PERSONAL NAME
Personal name Makabe, T.
Fuller form of name (Toshiaki),
Relator term author.
245 10 - TITLE STATEMENT
Title Plasma electronics :
Medium [Book] :
Remainder of title applications in microelectronic device fabrication /
Statement of responsibility, etc. Toshiaki Makabe, Zoran Lj. Petrovic.
250 ## - EDITION STATEMENT
Edition statement Second edition.
300 ## - PHYSICAL DESCRIPTION
Extent xxxv, 376 pages :
Other physical details illustrations ;
Dimensions 24 cm.
520 ## - SUMMARY, ETC.
Summary, etc. The book provides an up-to-date discussion of MEMS fabrication and phase transition between capacitive and inductive modes in an inductively coupled plasma. In addition to new sections on the phase transition between the capacitive and inductive modes in an ICP and MOS-transistor and MEMS fabrications, the book presents a new discussion of heat transfer and heating of the media and the reactor.
521 ## - TARGET AUDIENCE NOTE
Target audience note All.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Plasma engineering.
700 ## - ADDED ENTRY--PERSONAL NAME
Personal name Petrovic, Z.,
Relator term author.
852 ## - LOCATION
Piece designation 52172
-- 13092.26
Classification part 621.044 MAK-P
Sublocation or collection Ground Floor
Former shelving location Books
Copy number 1
Piece physical condition 1-New
Location JZL-CUI
Holdings
Date last seen Total checkouts Full call number Shelving location Price effective from Koha item type Lost status Damaged status Not for loan Withdrawn status Home library Barcode Current library Date acquired
09/12/2023   621.044 MAK-P Ground Floor 09/12/2023 Books         Junaid Zaidi Library, COMSATS University Islamabad 52172 Junaid Zaidi Library, COMSATS University Islamabad 09/12/2023