Plasma electronics : applications in microelectronic device fabrication /
Makabe, T.
Plasma electronics : applications in microelectronic device fabrication / [Book] : Toshiaki Makabe, Zoran Lj. Petrovic. - Second edition. - xxxv, 376 pages : illustrations ; 24 cm.
The book provides an up-to-date discussion of MEMS fabrication and phase transition between capacitive and inductive modes in an inductively coupled plasma. In addition to new sections on the phase transition between the capacitive and inductive modes in an ICP and MOS-transistor and MEMS fabrications, the book presents a new discussion of heat transfer and heating of the media and the reactor.
All.
9781482222050
Plasma engineering.
621.044
Plasma electronics : applications in microelectronic device fabrication / [Book] : Toshiaki Makabe, Zoran Lj. Petrovic. - Second edition. - xxxv, 376 pages : illustrations ; 24 cm.
The book provides an up-to-date discussion of MEMS fabrication and phase transition between capacitive and inductive modes in an inductively coupled plasma. In addition to new sections on the phase transition between the capacitive and inductive modes in an ICP and MOS-transistor and MEMS fabrications, the book presents a new discussion of heat transfer and heating of the media and the reactor.
All.
9781482222050
Plasma engineering.
621.044