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Plasma electronics : [Book] : applications in microelectronic device fabrication / Toshiaki Makabe, Zoran Lj. Petrovic.

By: Contributor(s): Material type: TextTextEdition: Second editionDescription: xxxv, 376 pages : illustrations ; 24 cmISBN:
  • 9781482222050
Subject(s): DDC classification:
  • 621.044
Other classification:
  • 621.044
Summary: The book provides an up-to-date discussion of MEMS fabrication and phase transition between capacitive and inductive modes in an inductively coupled plasma. In addition to new sections on the phase transition between the capacitive and inductive modes in an ICP and MOS-transistor and MEMS fabrications, the book presents a new discussion of heat transfer and heating of the media and the reactor.
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Holdings
Item type Current library Call number Status Date due Barcode Item holds
Books Books Junaid Zaidi Library, COMSATS University Islamabad Ground Floor 621.044 MAK-P (Browse shelf(Opens below)) Available 52172
Total holds: 0

The book provides an up-to-date discussion of MEMS fabrication and phase transition between capacitive and inductive modes in an inductively coupled plasma. In addition to new sections on the phase transition between the capacitive and inductive modes in an ICP and MOS-transistor and MEMS fabrications, the book presents a new discussion of heat transfer and heating of the media and the reactor.

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