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Microcircuit Engineering 88 [Book] : proceedings of the International Conference on Microlithography, September 20-22, 1988, Vienna, Austria / edited by F. Paschke, W. Fallmann and H. Löschner.

By: Contributor(s): Material type: TextTextSeries: Microelectronic engineering ; v. 9, no. 1/4.Publication details: New York, : North-Holland ; Tokyo : OHM ; New York, N.Y. U.S.A. : Distributors for the U.S. and Canada, Elsevier Science Pub. Co., 1989.Description: 653 p. : ill. ; 27 cmISBN:
  • 0444874488 (hbk)
Subject(s): DDC classification:
  • 621.38173 20
  • 621.381 531
Other classification:
  • 621.38173
Other related works: International Conference on Microlithography (14th : 1988 : Vienna, Austria) Microcircuit Engineering 88
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