MARC details
| 000 -LEADER |
|---|
| fixed length control field |
02299dam a22004813a 4500 |
| 001 - CONTROL NUMBER |
|---|
| control field |
0000036556 |
| 003 - CONTROL NUMBER IDENTIFIER |
|---|
| control field |
0001 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
890504r19891989ne b 10110 eng |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
0444874488 (hbk) |
| 040 ## - CATALOGING SOURCE |
|---|
| Original cataloging agency |
DLC |
| Language of cataloging |
eng |
| Transcribing agency |
DLC |
| Modifying agency |
CaOONL |
| -- |
CaOON |
| 082 0# - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.38173 |
| Edition number |
20 |
|
|---|
| Classification number |
621.381 531 |
| 084 ## - OTHER CLASSIFICATION NUMBER |
|---|
| Classification number |
621.38173 |
| Item number |
MIC |
| 111 20 - MAIN ENTRY--MEETING NAME |
|---|
| Number of part/section/meeting |
(14th :, |
| Location of meeting |
Vienna, Austria). |
| 245 00 - TITLE STATEMENT |
|---|
| Title |
Microcircuit Engineering 88 |
| Medium |
[Book] : |
| Remainder of title |
proceedings of the International Conference on Microlithography, September 20-22, 1988, Vienna, Austria / |
| Statement of responsibility, etc. |
edited by F. Paschke, W. Fallmann and H. Löschner. |
| 260 0# - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
New York, : |
| Name of publisher, distributor, etc. |
North-Holland ; |
| Place of publication, distribution, etc. |
Tokyo : |
| Name of publisher, distributor, etc. |
OHM ; |
| Place of publication, distribution, etc. |
New York, N.Y. U.S.A. : |
| Name of publisher, distributor, etc. |
Distributors for the U.S. and Canada, Elsevier Science Pub. Co., |
| Date of publication, distribution, etc. |
1989. |
| 263 ## - PROJECTED PUBLICATION DATE |
|---|
| Projected publication date |
8905 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
653 p. : |
| Other physical details |
ill. ; |
| Dimensions |
27 cm. |
| 440 #0 - SERIES STATEMENT/ADDED ENTRY--TITLE |
|---|
| Title |
Microelectronic engineering, |
| International Standard Serial Number |
0167-9317 ; |
| Volume/sequential designation |
v. 9, no. 1/4. |
| 500 ## - GENERAL NOTE |
|---|
| General note |
Includes index |
|
|---|
| General note |
Organized by the Erwin Schrödinger Association for Microsciences, Vienna, and by the Austrian Ministry for Science and Research. |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
|---|
| Bibliography, etc. note |
Includes bibliographies and index. |
| 521 ## - TARGET AUDIENCE NOTE |
|---|
| Target audience note |
All. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Microelectronics |
| General subdivision |
Congresses. |
|
|---|
| Topical term or geographic name entry element |
Microlithography |
| General subdivision |
Congresses. |
| 700 10 - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Fallmann, W. |
| Fuller form of name |
(Wolfgang) |
|
|---|
| Personal name |
Löschner, H. |
| Fuller form of name |
(Hans) |
|
|---|
| Personal name |
Paschke, F. |
| Fuller form of name |
(Fritz) |
| 710 10 - ADDED ENTRY--CORPORATE NAME |
|---|
| Corporate name or jurisdiction name as entry element |
Austria. |
| Subordinate unit |
Bundesministerium für Wissenschaft und Forschung. |
|
|---|
| Corporate name or jurisdiction name as entry element |
Erwin Schrödinger Association for Microsciences. |
| 787 1# - OTHER RELATIONSHIP ENTRY |
|---|
| Main entry heading |
International Conference on Microlithography (14th : 1988 : Vienna, Austria) |
| Title |
Microcircuit Engineering 88. |
| Place, publisher, and date of publication |
Amsterdam : North-Holland, 1989. |
| Series data for related item |
Microelectronic engineering 0167-9317 |
| 852 ## - LOCATION |
|---|
| Accession No. |
24675 |
| -- |
0.00 |
| Former shelving location |
Books |
| 910 20 - USER-OPTION DATA (OCLC) |
|---|
| User-option data |
Austria. |
| -- |
Federal Ministry of Science and Research. |
|
|---|
| User-option data |
Austria. |
| -- |
Ministry for Science and Research. |
|
|---|
| User-option data |
Austrian Federal Ministry for Science and Research. |
| 911 20 - EQUIVALENCE OR CROSS-REFERENCE-CONFERENCE OR MEETING NAME [LOCAL, CANADA] |
|---|
| Meeting name or jurisdiction name as entry element |
ME88 |
| Number of part/section/meeting |
(14th : |
| Date of meeting |
1988 : |
| Location of meeting |
Vienna, Austria) |
|
|---|
| Meeting name or jurisdiction name as entry element |
Microcircuit Engineering 88 |
| Number of part/section/meeting |
(14th : |
| Date of meeting |
1988 : |
| Location of meeting |
Vienna, Austria) |
| 990 10 - EQUIVALENCES OR CROSS-REFERENCES [LOCAL, CANADA] |
|---|
| Link information for 9XX fields |
91001ab |
| Link information for field corresponding to 9XX field |
71001ab |
|
|---|
| Link information for 9XX fields |
91002ab |
| Link information for field corresponding to 9XX field |
71001ab |
|
|---|
| Link information for 9XX fields |
91003a |
| Link information for field corresponding to 9XX field |
71001ab |
|
|---|
| Link information for 9XX fields |
91101andc |
| Link information for field corresponding to 9XX field |
11101andc |
|
|---|
| Link information for 9XX fields |
91102andc |
| Link information for field corresponding to 9XX field |
11101andc |
