Microcircuit Engineering 88 [Book] : proceedings of the International Conference on Microlithography, September 20-22, 1988, Vienna, Austria / edited by F. Paschke, W. Fallmann and H. Löschner.
Material type: TextSeries: Microelectronic engineering ; v. 9, no. 1/4.Publication details: New York, : North-Holland ; Tokyo : OHM ; New York, N.Y. U.S.A. : Distributors for the U.S. and Canada, Elsevier Science Pub. Co., 1989.Description: 653 p. : ill. ; 27 cmISBN:- 0444874488 (hbk)
- 621.38173 20
- 621.381 531
- 621.38173
Item type | Current library | Call number | Status | Date due | Barcode | Item holds |
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Books | Junaid Zaidi Library, COMSATS University Islamabad | 621.38173 MIC (Browse shelf(Opens below)) | Available | 24675 |
Includes index
Organized by the Erwin Schrödinger Association for Microsciences, Vienna, and by the Austrian Ministry for Science and Research.
Includes bibliographies and index.
All.
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