Microcircuit Engineering 88 proceedings of the International Conference on Microlithography, September 20-22, 1988, Vienna, Austria /
Microcircuit Engineering 88 proceedings of the International Conference on Microlithography, September 20-22, 1988, Vienna, Austria / [Book] :
edited by F. Paschke, W. Fallmann and H. Löschner.
- New York, : Tokyo : New York, N.Y. U.S.A. : North-Holland ; OHM ; Distributors for the U.S. and Canada, Elsevier Science Pub. Co., 1989.
- 653 p. : ill. ; 27 cm.
- Microelectronic engineering, v. 9, no. 1/4. 0167-9317 ; .
Includes index Organized by the Erwin Schrödinger Association for Microsciences, Vienna, and by the Austrian Ministry for Science and Research.
Includes bibliographies and index.
All.
0444874488 (hbk)
Microelectronics--Congresses.
Microlithography--Congresses.
621.38173 621.381 531
Includes index Organized by the Erwin Schrödinger Association for Microsciences, Vienna, and by the Austrian Ministry for Science and Research.
Includes bibliographies and index.
All.
0444874488 (hbk)
Microelectronics--Congresses.
Microlithography--Congresses.
621.38173 621.381 531