Microcircuit Engineering 88 proceedings of the International Conference on Microlithography, September 20-22, 1988, Vienna, Austria /

Microcircuit Engineering 88 proceedings of the International Conference on Microlithography, September 20-22, 1988, Vienna, Austria / [Book] : edited by F. Paschke, W. Fallmann and H. Löschner. - New York, : Tokyo : New York, N.Y. U.S.A. : North-Holland ; OHM ; Distributors for the U.S. and Canada, Elsevier Science Pub. Co., 1989. - 653 p. : ill. ; 27 cm. - Microelectronic engineering, v. 9, no. 1/4. 0167-9317 ; .

Includes index Organized by the Erwin Schrödinger Association for Microsciences, Vienna, and by the Austrian Ministry for Science and Research.

Includes bibliographies and index.

All.

0444874488 (hbk)


Microelectronics--Congresses.
Microlithography--Congresses.

621.38173 621.381 531