Plasma etching [Book] : fundamentals and applications / M. Sugawara ; with contributions from Barry L. Stonsfield ... [et al.].

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TextSeries: Series on semiconductor science and technology ; 7Publication details: New York : Oxford University Press, 1998.Description: viii, 347 p. : ill. (some col.) ; 24 cmISBN:

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Item type	Current library	Call number	Status	Date due	Barcode	Item holds
Books	Junaid Zaidi Library, COMSATS University Islamabad Ground Floor	621.381531 SUG-P (Browse shelf(Opens below))	Available		24766

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