Plasma etching fundamentals and applications /
Sugawara, M.
Plasma etching fundamentals and applications / [Book] : M. Sugawara ; with contributions from Barry L. Stonsfield ... [et al.]. - New York : Oxford University Press, 1998. - viii, 347 p. : ill. (some col.) ; 24 cm. - Series on semiconductor science and technology ; 7 .
All.
019856287X
Semiconductors--Etching.
Plasma etching.
621.381531
Plasma etching fundamentals and applications / [Book] : M. Sugawara ; with contributions from Barry L. Stonsfield ... [et al.]. - New York : Oxford University Press, 1998. - viii, 347 p. : ill. (some col.) ; 24 cm. - Series on semiconductor science and technology ; 7 .
All.
019856287X
Semiconductors--Etching.
Plasma etching.
621.381531