Plasma etching (Record no. 156212)

MARC details
000 -LEADER
fixed length control field 00920pam a2200253 a 4500
001 - CONTROL NUMBER
control field 0000046837
003 - CONTROL NUMBER IDENTIFIER
control field 0001
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 971028s1998 nyua b 001 0 eng
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 019856287X
035 ## - SYSTEM CONTROL NUMBER
-- (DLC) 97039210
040 ## - CATALOGING SOURCE
Original cataloging agency DLC
Transcribing agency DLC
Modifying agency DLC
082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 621.381531
Edition number 21
084 ## - OTHER CLASSIFICATION NUMBER
Classification number 621.381531
Item number SUG-P
100 1# - MAIN ENTRY--PERSONAL NAME
Personal name Sugawara, M.
Fuller form of name (Minoru)
245 10 - TITLE STATEMENT
Title Plasma etching
Medium [Book] :
Remainder of title fundamentals and applications /
Statement of responsibility, etc. M. Sugawara ; with contributions from Barry L. Stonsfield ... [et al.].
260 ## - PUBLICATION, DISTRIBUTION, ETC.
Place of publication, distribution, etc. New York :
Name of publisher, distributor, etc. Oxford University Press,
Date of publication, distribution, etc. 1998.
300 ## - PHYSICAL DESCRIPTION
Extent viii, 347 p. :
Other physical details ill. (some col.) ;
Dimensions 24 cm.
440 #0 - SERIES STATEMENT/ADDED ENTRY--TITLE
Title Series on semiconductor science and technology ;
Volume/sequential designation 7
521 ## - TARGET AUDIENCE NOTE
Target audience note All.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Semiconductors
General subdivision Etching.
Topical term or geographic name entry element Plasma etching.
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Stansfield, Barry L.
852 ## - LOCATION
Accession No. 24766
-- 0.00
Former shelving location Books
Holdings
Withdrawn status Lost status Damaged status Not for loan Home library Current library Shelving location Date acquired Total checkouts Full call number Barcode Date last seen Price effective from Koha item type
        Junaid Zaidi Library, COMSATS University Islamabad Junaid Zaidi Library, COMSATS University Islamabad Ground Floor 09/18/2023   621.381531 SUG-P 24766 09/18/2023 09/18/2023 Books