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Sub-half-micron lithography for ULSIs [Book] / edited by Katsumi Suzuki, Shinji Matsui, and Yukinori Ochiai.

Contributor(s): Material type: TextTextPublication details: Cambridge ; New York : Cambridge University Press, 2000.Description: xvii, 323 p. : ill. ; 25 cmISBN:
  • 0521570808 (hbk)
Subject(s): DDC classification:
  • 621.395 21
Other classification:
  • 621.395
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Holdings
Item type Current library Call number Status Date due Barcode Item holds
Books Books Junaid Zaidi Library, COMSATS University Islamabad Ground Floor 621.395 SUB (Browse shelf(Opens below)) Available 24865
Total holds: 0

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