Sub-half-micron lithography for ULSIs (Record no. 153798)
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000 -LEADER | |
---|---|
fixed length control field | 01021cam a22002894a 4500 |
001 - CONTROL NUMBER | |
control field | 0000036534 |
003 - CONTROL NUMBER IDENTIFIER | |
control field | 0001 |
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
fixed length control field | 990113s2000 enka b 001 0 eng |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
International Standard Book Number | 0521570808 (hbk) |
035 ## - SYSTEM CONTROL NUMBER | |
-- | (DLC) 99013558 |
040 ## - CATALOGING SOURCE | |
Original cataloging agency | DLC |
Transcribing agency | DLC |
Modifying agency | DLC |
042 ## - AUTHENTICATION CODE | |
Authentication code | pcc |
082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER | |
Classification number | 621.395 |
Edition number | 21 |
084 ## - OTHER CLASSIFICATION NUMBER | |
Classification number | 621.395 |
Item number | SUB |
245 00 - TITLE STATEMENT | |
Title | Sub-half-micron lithography for ULSIs |
Medium | [Book] / |
Statement of responsibility, etc. | edited by Katsumi Suzuki, Shinji Matsui, and Yukinori Ochiai. |
260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
Place of publication, distribution, etc. | Cambridge ; |
-- | New York : |
Name of publisher, distributor, etc. | Cambridge University Press, |
Date of publication, distribution, etc. | 2000. |
300 ## - PHYSICAL DESCRIPTION | |
Extent | xvii, 323 p. : |
Other physical details | ill. ; |
Dimensions | 25 cm. |
500 ## - GENERAL NOTE | |
General note | Includes index |
521 ## - TARGET AUDIENCE NOTE | |
Target audience note | All. |
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
Topical term or geographic name entry element | Integrated circuits |
General subdivision | Ultra large scale integration |
-- | Design and construction. |
Topical term or geographic name entry element | Microlithography. |
Topical term or geographic name entry element | Printed circuits |
General subdivision | Design and construction. |
700 1# - ADDED ENTRY--PERSONAL NAME | |
Personal name | Suzuki, Katsumi, |
Dates associated with a name | 1950- |
Personal name | Matsui, Shinji |
Personal name | Ochiai, Yukinori, |
Dates associated with a name | 1955- |
852 ## - LOCATION | |
Accession No. | 24865 |
-- | 0.00 |
Former shelving location | Books |
Withdrawn status | Lost status | Damaged status | Not for loan | Home library | Current library | Shelving location | Date acquired | Total checkouts | Full call number | Barcode | Date last seen | Price effective from | Koha item type |
---|---|---|---|---|---|---|---|---|---|---|---|---|---|
Junaid Zaidi Library, COMSATS University Islamabad | Junaid Zaidi Library, COMSATS University Islamabad | Ground Floor | 09/18/2023 | 621.395 SUB | 24865 | 09/18/2023 | 09/18/2023 | Books |