Sub-half-micron lithography for ULSIs

Sub-half-micron lithography for ULSIs [Book] / edited by Katsumi Suzuki, Shinji Matsui, and Yukinori Ochiai. - Cambridge ; New York : Cambridge University Press, 2000. - xvii, 323 p. : ill. ; 25 cm.

Includes index

All.

0521570808 (hbk)


Integrated circuits--Ultra large scale integration--Design and construction.
Microlithography.
Printed circuits--Design and construction.

621.395