The science and engineering of microelectronic fabrication [Book] / Stephen A. Campbell.
Material type: TextSeries: The Oxford series in electrical and computer engineeringPublication details: New York : Oxford University Press, 2001.Edition: 2nd edDescription: xiv, 603 p. : ill. ; 24 cmISBN:- 0195136055 (hbk)
- 9780195136050
- 621.38152 21
- 621.38152
Total holds: 0
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621.38152 CAM-S The science and engineering of microelectronic fabrication | 621.38152 CAM-S The science and engineering of microelectronic fabrication | 621.38152 CAM-S The science and engineering of microelectronic fabrication | 621.38152 CAM-S The science and engineering of microelectronic fabrication | 621.38152 CAM-S The science and engineering of microelectronic fabrication | 621.38152 CAM-S The science and engineering of microelectronic fabrication | 621.38152 SIN-S Semiconductor optoelectronics physics and technology / |
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