The science and engineering of microelectronic fabrication
Campbell, Stephen A., 1954-
The science and engineering of microelectronic fabrication [Book] / Stephen A. Campbell. - 2nd ed. - New York : Oxford University Press, 2001. - xiv, 603 p. : ill. ; 24 cm. - The Oxford series in electrical and computer engineering .
All.
0195136055 (hbk) 9780195136050
Semiconductors--Design and construction.
621.38152
The science and engineering of microelectronic fabrication [Book] / Stephen A. Campbell. - 2nd ed. - New York : Oxford University Press, 2001. - xiv, 603 p. : ill. ; 24 cm. - The Oxford series in electrical and computer engineering .
All.
0195136055 (hbk) 9780195136050
Semiconductors--Design and construction.
621.38152