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Fundamental aspects of silicon oxidation [Book] / Yves J. Chabal (ed.).

Contributor(s): Material type: TextTextSeries: Publication details: Berlin ; : Springer, c2001.Description: xiii, 260 p. : ill. (some col.) ; 24 cmISBN:
  • 354041682X
Subject(s): DDC classification:
  • 546.6832 21
Other classification:
  • 546.6832
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