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Fundamental aspects of silicon oxidation

Fundamental aspects of silicon oxidation [Book] / Yves J. Chabal (ed.). - Berlin ; : Springer, c2001. - xiii, 260 p. : ill. (some col.) ; 24 cm. - Springer series in materials science ; 46. .

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ISBN: 354041682X

Subjects--Topical Terms:
Silicon oxide.

Dewey Class. No.: 546.6832

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