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Mechanical microsensors [Book] / M. Elwenspoek, R. Wiergerink.

By: Contributor(s): Material type: TextTextSeries: Microtechnology and MEMSPublication details: Berlin ; : Springer, c2001.Description: x, 295 p. : ill. ; 25 cmISBN:
  • 3540675825
Subject(s): DDC classification:
  • 681.2 21
Other classification:
  • 681.2
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