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Mechanical microsensors

Elwenspoek, M. 1948-

Mechanical microsensors [Book] / M. Elwenspoek, R. Wiergerink. - Berlin ; : Springer, c2001. - x, 295 p. : ill. ; 25 cm. - Microtechnology and MEMS. .

All.

ISBN: 3540675825

Subjects--Topical Terms:
Detectors--Design and construction.
Microelectromechanical systems--Design and construction.
Transducers.
Silicon.
Micromachining.

Dewey Class. No.: 681.2

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