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Sputtering by particle bombardment III : characteristics of sputtered particles, technical applications [Book] / edited by R. Behrisch, K. Wittmaack.

Contributor(s): Material type: TextTextSeries: Topics in applied physics ; v.47Publication details: Berlin : Springer, c1981-1991.Description: 3 v. : ill. ; 24 cmISBN:
  • 3540534288
  • 0387534288
Subject(s): DDC classification:
  • 530.416
Other classification:
  • 530.416
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