Sputtering by particle bombardment III : characteristics of sputtered particles, technical applications
Sputtering by particle bombardment III : characteristics of sputtered particles, technical applications [Book] /
edited by R. Behrisch, K. Wittmaack.
- Berlin : Springer, c1981-1991.
- 3 v. : ill. ; 24 cm.
- Topics in applied physics ; v.47 .
All.
3540534288 0387534288
Sputtering (Physics).
Solids--Effect of radiation on.
Surfaces (Physics) - Effect of radiation on.
530.416
All.
3540534288 0387534288
Sputtering (Physics).
Solids--Effect of radiation on.
Surfaces (Physics) - Effect of radiation on.
530.416