Sputtering by particle bombardment III : characteristics of sputtered particles, technical applications

Sputtering by particle bombardment III : characteristics of sputtered particles, technical applications [Book] / edited by R. Behrisch, K. Wittmaack. - Berlin : Springer, c1981-1991. - 3 v. : ill. ; 24 cm. - Topics in applied physics ; v.47 .

All.

3540534288 0387534288


Sputtering (Physics).
Solids--Effect of radiation on.
Surfaces (Physics) - Effect of radiation on.

530.416