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Microlithography [Book] : science and technology / edited by James R. Sheats, Bruce W. Smith.

Contributor(s): Material type: TextTextPublication details: New York : Marcel Dekker, c1998.Description: xii, 780 p. : ill. ; 24 cmISBN:
  • 0824799534 (alk. paper)
Subject(s): DDC classification:
  • 621.3815 31 21
Other classification:
  • 621.381531
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Holdings
Item type Current library Call number Status Date due Barcode Item holds
Books Books Junaid Zaidi Library, COMSATS University Islamabad Ground Floor 621.381531 MIC (Browse shelf(Opens below)) Available 20915
Books Books Junaid Zaidi Library, COMSATS University Islamabad Ground Floor 621.381531 MIC (Browse shelf(Opens below)) Available 20796
Total holds: 0

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