Microlithography (Record no. 151153)
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000 -LEADER | |
---|---|
fixed length control field | 01141cam a2200289 a 4500 |
001 - CONTROL NUMBER | |
control field | 0000046889 |
003 - CONTROL NUMBER IDENTIFIER | |
control field | 0001 |
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
fixed length control field | 980316s1998 nyua b 001 0 eng |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
International Standard Book Number | 0824799534 (alk. paper) |
035 ## - SYSTEM CONTROL NUMBER | |
-- | (DLC) 98016713 |
040 ## - CATALOGING SOURCE | |
Original cataloging agency | DLC |
Transcribing agency | DLC |
Modifying agency | DLC |
082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER | |
Classification number | 621.3815 31 |
Edition number | 21 |
084 ## - OTHER CLASSIFICATION NUMBER | |
Classification number | 621.381531 |
Item number | MIC |
245 00 - TITLE STATEMENT | |
Title | Microlithography |
Medium | [Book] : |
Remainder of title | science and technology / |
Statement of responsibility, etc. | edited by James R. Sheats, Bruce W. Smith. |
260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
Place of publication, distribution, etc. | New York : |
Name of publisher, distributor, etc. | Marcel Dekker, |
Date of publication, distribution, etc. | c1998. |
300 ## - PHYSICAL DESCRIPTION | |
Extent | xii, 780 p. : |
Other physical details | ill. ; |
Dimensions | 24 cm. |
500 ## - GENERAL NOTE | |
General note | Index includes |
521 ## - TARGET AUDIENCE NOTE | |
Target audience note | All. |
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
Topical term or geographic name entry element | Microlithography |
General subdivision | Industrial applications. |
Topical term or geographic name entry element | Integrated circuits |
General subdivision | Masks. |
Topical term or geographic name entry element | Metal oxide semiconductors, Complementary |
General subdivision | Design and construction. |
Topical term or geographic name entry element | Manufacturing processes. |
700 1# - ADDED ENTRY--PERSONAL NAME | |
Personal name | Sheats, James R., |
Dates associated with a name | 1948- |
Personal name | Smith, Bruce W., |
Dates associated with a name | 1959- |
852 ## - LOCATION | |
Accession No. | 20915 |
-- | 0.00 |
Former shelving location | Books |
Accession No. | 20796 |
-- | 10592.00 |
-- | Rising Sun Educational Service |
Former shelving location | Books |
Withdrawn status | Lost status | Damaged status | Not for loan | Home library | Current library | Shelving location | Date acquired | Total checkouts | Full call number | Barcode | Date last seen | Price effective from | Koha item type |
---|---|---|---|---|---|---|---|---|---|---|---|---|---|
Junaid Zaidi Library, COMSATS University Islamabad | Junaid Zaidi Library, COMSATS University Islamabad | Ground Floor | 09/18/2023 | 621.381531 MIC | 20915 | 09/18/2023 | 09/18/2023 | Books | |||||
Junaid Zaidi Library, COMSATS University Islamabad | Junaid Zaidi Library, COMSATS University Islamabad | Ground Floor | 09/18/2023 | 621.381531 MIC | 20796 | 09/18/2023 | 09/18/2023 | Books |