Microlithography (Record no. 151153)

MARC details
000 -LEADER
fixed length control field 01141cam a2200289 a 4500
001 - CONTROL NUMBER
control field 0000046889
003 - CONTROL NUMBER IDENTIFIER
control field 0001
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 980316s1998 nyua b 001 0 eng
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 0824799534 (alk. paper)
035 ## - SYSTEM CONTROL NUMBER
-- (DLC) 98016713
040 ## - CATALOGING SOURCE
Original cataloging agency DLC
Transcribing agency DLC
Modifying agency DLC
082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 621.3815 31
Edition number 21
084 ## - OTHER CLASSIFICATION NUMBER
Classification number 621.381531
Item number MIC
245 00 - TITLE STATEMENT
Title Microlithography
Medium [Book] :
Remainder of title science and technology /
Statement of responsibility, etc. edited by James R. Sheats, Bruce W. Smith.
260 ## - PUBLICATION, DISTRIBUTION, ETC.
Place of publication, distribution, etc. New York :
Name of publisher, distributor, etc. Marcel Dekker,
Date of publication, distribution, etc. c1998.
300 ## - PHYSICAL DESCRIPTION
Extent xii, 780 p. :
Other physical details ill. ;
Dimensions 24 cm.
500 ## - GENERAL NOTE
General note Index includes
521 ## - TARGET AUDIENCE NOTE
Target audience note All.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Microlithography
General subdivision Industrial applications.
Topical term or geographic name entry element Integrated circuits
General subdivision Masks.
Topical term or geographic name entry element Metal oxide semiconductors, Complementary
General subdivision Design and construction.
Topical term or geographic name entry element Manufacturing processes.
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Sheats, James R.,
Dates associated with a name 1948-
Personal name Smith, Bruce W.,
Dates associated with a name 1959-
852 ## - LOCATION
Accession No. 20915
-- 0.00
Former shelving location Books
Accession No. 20796
-- 10592.00
-- Rising Sun Educational Service
Former shelving location Books
Holdings
Withdrawn status Lost status Damaged status Not for loan Home library Current library Shelving location Date acquired Total checkouts Full call number Barcode Date last seen Price effective from Koha item type
        Junaid Zaidi Library, COMSATS University Islamabad Junaid Zaidi Library, COMSATS University Islamabad Ground Floor 09/18/2023   621.381531 MIC 20915 09/18/2023 09/18/2023 Books
        Junaid Zaidi Library, COMSATS University Islamabad Junaid Zaidi Library, COMSATS University Islamabad Ground Floor 09/18/2023   621.381531 MIC 20796 09/18/2023 09/18/2023 Books