000			01189cam a2200217 i 4500
001			0000067507
003			0001
008			150714s2015 flua b 001 0 eng c
020			_a9781482222050
082	0	0	_a621.044
084			_a621.044 _bMAK-P
100	1		_aMakabe, T. _q(Toshiaki), _eauthor.
245	1	0	_aPlasma electronics : _h[Book] : _bapplications in microelectronic device fabrication / _cToshiaki Makabe, Zoran Lj. Petrovic.
250			_aSecond edition.
300			_axxxv, 376 pages : _billustrations ; _c24 cm.
520			_aThe book provides an up-to-date discussion of MEMS fabrication and phase transition between capacitive and inductive modes in an inductively coupled plasma. In addition to new sections on the phase transition between the capacitive and inductive modes in an ICP and MOS-transistor and MEMS fabrications, the book presents a new discussion of heat transfer and heating of the media and the reactor.
521			_aAll.
650		0	_aPlasma engineering.
700			_aPetrovic, Z., _eauthor.
852			_p52172 _913092.26 _h621.044 MAK-P _bGround Floor _dBooks _t1 _q1-New _aJZL-CUI
999			_c71666 _d71666