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| 001 | 0000331819 | ||
| 003 | 0003 | ||
| 008 | 191220s9999||||xx |||||||||||||| ||eng|| | ||
| 020 | _a8179924750 | ||
| 082 | _a621.395 | ||
| 084 |
_a621.395 _bHEL |
||
| 100 | _aHelbert, John N. | ||
| 245 | 0 |
_aHandbook of VLSI microlithography _h[Book] _bprinciples, tools, technology and applications _cJohn N. Helbert. |
|
| 260 | _bJaico Publishing House New Delhi | ||
| 521 | _aAll. | ||
| 650 | _aIntegrated Circuits--Very Large Scale Integration | ||
| 852 |
_p10003000014476 _92781.00 _h621.395 HEL _bMain Library _dTextbooks _t1 _q1-New _aAbbotabad Campus |
||
| 999 |
_c366377 _d366377 |
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