000 00548nam a2200181Ia 4500
001 0000237413
003 0004
008 181108s9999||||xx |||||||||||||| ||eng||
020 _a 9781316609040
084 _a621.381
_bJON
100 _a Jones, T. B.
245 0 _aElectromechanics and MEMS
_h[Book].
260 _aCambridge
_bCambridge University Press
_c2013
521 _aAll.
650 _aElectromechanics and MEMS
700 _a Nenadic, Nenad G.
852 _p10004000022243
_90.00
_dBooks
999 _c285378
_d285378