| 000 | 00575nam a2200181Ia 4500 | ||
|---|---|---|---|
| 001 | 0000234533 | ||
| 003 | 0004 | ||
| 008 | 181108s9999||||xx |||||||||||||| ||eng|| | ||
| 020 | _a9780387095103 | ||
| 084 |
_a621.381 _bADA |
||
| 100 | _aAdams, Thomas M. | ||
| 245 | 0 |
_aIntroductory MEMS _h[Book] _b Fabrication and application. |
|
| 260 |
_aNew Delhi _bSpringer _c2012 |
||
| 521 | _aAll. | ||
| 650 | _aIntroductory MEMS: Fabrication and application | ||
| 700 | _aLayton, Richard A. | ||
| 852 |
_p10004000018083 _90.00 _dBooks |
||
| 999 |
_c281098 _d281098 |
||