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_aAn Introduction to Microelectromechanical Systems Engineering _h[Book]. |
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| 250 | _a2nd | ||
| 260 | _bArtech House | ||
| 521 | _aAll. | ||
| 650 | _aAn Introduction to Microelectromechanical Systems Engineering | ||
| 700 | _aWilliams ,K | ||
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_p10004000007394 _96878.00 _dBooks |
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