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020 _a007048709x
084 _a621.381
_bHSU
100 _aHsu,T.R
245 0 _aMEMS &Microsystems
_h[Book]
_b Design and Manufacture.
260 _bMcGraw Hill
521 _aAll.
650 _aMEMS &Microsystems
852 _p10004000007669
_9491.00
_dBooks
999 _c276063
_d276063