000 01013cam a22002897a 4500
001 0000051019
003 0001
008 081212s2009 flua b 001 0 eng d
015 _aGBA8B7636
_2bnb
016 7 _a013807776
_2Uk
020 _a9781420045680
035 _a(OCoLC)ocn150381346
040 _aBTCTA
_cBTCTA
_dBAKER
_dYDXCP
_dBWX
_dOCLCQ
_dUKM
_dCDX
_dDLC
042 _alccopycat
082 0 4 _a621.381
_222
084 _a621.381
_bLIU-P
100 1 _aLiu, Ai-Qun.
245 1 0 _aPhotonic MEMS devices
_h[Book] :
_bdesign, fabrication and control /
_cAi-Qun Liu ; co-authors, Xuming Zhang ... [et al.].
260 _aBoca Raton, FL :
_bCRC Press,
_cc2009.
300 _a483 p. :
_bill. ;
_c27 cm.
365 _a01
_b9,438.51
440 0 _aOptical science and engineering series ;
_v136
521 _aAll.
650 0 _aMicroelectromechanical systems.
650 0 _aPhotonics.
852 _p33207
_99438.51
_vSaeed Book Bank
_dBooks
999 _c173781
_d173781