| 000 | 00722pam a22002054a 4500 | ||
|---|---|---|---|
| 001 | 0000052966 | ||
| 003 | 0001 | ||
| 008 | 010126s2001 gw b 001 0 eng | ||
| 020 | _a354041682X | ||
| 082 | 0 | 0 |
_a546.6832 _221 |
| 084 |
_a546.6832 _bFUN |
||
| 245 | 0 | 0 |
_aFundamental aspects of silicon oxidation _h[Book] / _cYves J. Chabal (ed.). |
| 260 |
_aBerlin ; : _bSpringer, _cc2001. |
||
| 300 |
_axiii, 260 p. : _bill. (some col.) ; _c24 cm. |
||
| 490 | 1 |
_aSpringer series in materials science ; _v46. |
|
| 521 | _aAll. | ||
| 650 | 0 | _aSilicon oxide. | |
| 700 | 1 |
_aChabal, Yves Jean, _d1952- |
|
| 852 |
_p12194 _94173.32 _vEagle Information Marketing _dBooks |
||
| 999 |
_c171453 _d171453 |
||