| 000 | 00950cam a22002774a 4500 | ||
|---|---|---|---|
| 001 | 0000046489 | ||
| 003 | 0001 | ||
| 008 | 971107s1998 enka b 001 0 eng | ||
| 020 | _a052159054X | ||
| 035 | _9(DLC) 97043732 | ||
| 040 |
_aDLC _cDLC _dDLC |
||
| 042 | _apcc | ||
| 082 | 0 | 0 |
_a621.3815 _221 |
| 084 |
_a621.3815 _bELW-S |
||
| 100 | 1 |
_aElwenspoek, M. _q(Miko), _d1948- |
|
| 245 | 1 | 0 |
_aSilicon micromachining _h[Book] / _cM. Elwenspoek and H.V. Jansen. |
| 260 |
_aCambridge, [England] ; _aNew York : _bCambridge University Press, _c1998. |
||
| 300 |
_axiii, 405 p. : _bill. ; _c26 cm. |
||
| 440 | 0 |
_aCambridge studies in semiconductor physics and microelectronic engineering ; _v7 |
|
| 521 | _aAll. | ||
| 650 | 0 | _aSilicon. | |
| 650 | 0 | _aMicromachining. | |
| 650 | 0 | _aMicroelectronic circuits. | |
| 700 |
_aJansen, H. V. _q(Henri V.) |
||
| 852 |
_p24840 _90.00 _dBooks |
||
| 999 |
_c169188 _d169188 |
||