000 00758nam#a2200193#a#4500
001 0000044133
003 0001
008 111215s1997 ##############000#0#eng#d
082 _a620.5
084 _a620.5
_bMIC
245 0 0 _aMicro-and nano-engineering 96
_h[Book] :
_bproceedings of the international conference on micro-and nanofabrication September 22-25, 1996 Glasgow, Scotland, UK /
_cEdited by S. P. Beaumont and C. D. W. Wilkinson.
260 _aNew York :
_bElsevier,
_c1997.
300 _axvii, 580 p. ;
_c25 cm.
521 _aAll.
650 0 _aNanotechnology.
650 0 _aNanostructure materials.
700 1 _aBeaumont, S. P.,
_dWilkinson, C. D. W.
852 _p24658
_90.00
_dBooks
999 _c167747
_d167747