000			01100cam a22003014a 4500
001			0000046719
003			0001
008			010801s2002 flua b 001 0 eng
020			_a0849308267
040			_aDLC _cDLC _dDLC
042			_apcc
082	0	0	_a621.38152 _221
084			_a621.38152 _bMAD-F
100	1		_aMadou, Marc J.
245	1	0	_aFundamentals of microfabrication _h[Book] : _bthe science of miniaturization / _cMarc J. Madou.
250			_a2nd ed.
260			_aBoca Raton : _bCRC Press, _cc2002.
300			_a723 p. : _bcol. ill. ; _c29 cm.
521			_aAll.
650		0	_aMicroelectronics.
650		0	_aIntegrated circuits _xDesign and construction.
650		0	_aMicroelectromechanical systems _xDesign and construction.
650		0	_aMachining.
650		0	_aMicroelectronic packaging.
650		0	_aLasers _xIndustrial applications.
852			_p20895 _90.00 _dBooks
852			_p20768 _96391.45 _vRising Sun Educational Service _dBooks
999			_c160497 _d160497