| 000 | 00900nam a22002173a 4500 | ||
|---|---|---|---|
| 001 | 0000036493 | ||
| 003 | 0001 | ||
| 008 | 850711s1982 fr a|||| 10||0 eng d | ||
| 040 |
_aCaOON _beng _cCaOON |
||
| 082 | _a621.38173 | ||
| 084 |
_a621.38173 _bMIC |
||
| 245 | 0 | 0 |
_aMicrocircuit engineering 82 _h[Book] : _bInternational Conference on Microlithography, October 5-8, 1982, Grenoble, France = Colloque international sur la microlithographie |
| 260 | 0 |
_aGrenoble : _bComit ̌du Colloque international sur la microlithographie, _c1982. |
|
| 300 |
_axvi, 379 p. : _bill. ; _c30 cm. |
||
| 500 | _aCover title. | ||
| 500 | _aEnglish and French. | ||
| 521 | _aAll. | ||
| 650 | 0 |
_aIntegrated circuits _xLarge scale integration _xCongresses. |
|
| 650 | 0 |
_aPhotolithography _xCongresses. |
|
| 852 |
_p24680 _90.00 _dBooks |
||
| 999 |
_c158550 _d158550 |
||