000 01127cam a22003134a 4500
001 0000046302
003 0001
008 050713s2006 flua b 001 0 eng
020 _a0849391393 (alk. paper)
040 _aDLC
_beng
_cDLC
_dDLC
042 _apcc
082 0 0 _a621.381
_222
084 _a621.381
_bMEM
245 0 0 _aMEMS
_h[Book] :
_bapplications /
_cedited by Mohamed Gad-el-Hak.
250 _a2nd ed.
260 _aBoca Raton, FL :
_bCRC Press/Taylor & Francis,
_c2006.
300 _a1 v. (various pagings) :
_bill. ;
_c26 cm.
490 1 _aMechanical engineering series
490 0 _aThe MEMS handbook
500 _aOne of three parts whose previous edition was a published as a single volume.
521 _aAll.
650 0 _aMicroelectromechanical systems.
650 0 _aDetectors.
650 0 _aMicroactuators.
650 0 _aRobots.
700 _aGad-el-Hak, Mohamed,
_d1945-
852 _p20973
_90.00
_dReference
852 _p20718
_94122.03
_vEagle Information Marketing
_dBooks
999 _c156512
_d156512