| 000 | 01251cam a22003134a 4500 | ||
|---|---|---|---|
| 001 | 0000041768 | ||
| 003 | 0001 | ||
| 008 | 050525s2006 flua b 001 0 eng | ||
| 020 | _a0849391385 (hbk) | ||
| 040 |
_aDLC _cDLC _dDLC _dDLC |
||
| 042 | _apcc | ||
| 082 | 0 | 0 |
_a621.381 _222 |
| 084 |
_a621.381 _bMEM |
||
| 245 | 0 | 0 |
_aMEMS : _h[Book] : _bdesign and fabrication / _cedited by Mohamed Gad-el-Hak. |
| 250 | _aSecond edition. | ||
| 260 |
_aBoca Raton, FL : _bCRC/Taylor & Francis, _c2006. |
||
| 300 |
_a1 v. (various pagings) : _billustrations ; _c26 cm. |
||
| 490 | 1 | _aMechanical engineering series | |
| 490 | 0 | _aThe MEMS handbook | |
| 500 | _aOne of three parts whose previous edition was a published as a single volume. | ||
| 521 | _aAll. | ||
| 650 | 0 |
_aMicroelectromechanical systems _xDesign and construction. |
|
| 650 | 0 | _aMicrofabrication. | |
| 650 | 0 |
_aMicroelectromechanical systems. _zNanotechnology |
|
| 650 | 0 |
_aMechanical engineering. _zMicroelectronics |
|
| 700 |
_aGad-el-Hak, Mohamed, _d1945- |
||
| 852 |
_p20975 _90.00 _dReference |
||
| 852 |
_p20720 _94122.03 _vEagle Information Marketing _dBooks |
||
| 999 |
_c156317 _d156317 |
||