| 000 | 00892pam a2200253 a 4500 | ||
|---|---|---|---|
| 001 | 0000036497 | ||
| 003 | 0001 | ||
| 008 | 860616s1987 nyua b 001 0 eng | ||
| 020 | _a0070542805 (pbk) | ||
| 020 | _a0070542805 (text) | ||
| 035 | _9(DLC) 86015362 | ||
| 040 |
_aDLC _cDLC _dDLC |
||
| 082 | 0 | 0 |
_a621.38173 _219 |
| 084 |
_a621.38173 _bRUS-M |
||
| 100 | 1 |
_aRuska, W. Scot _q(Walter Scot) |
|
| 245 | 1 | 0 |
_aMicroelectronic processing _h[Book] : _ban introduction to the manufacture of integrated circuits / _cW. Scot Ruska. |
| 260 |
_aNew York : _bMcGraw-Hill, _cc1987. |
||
| 300 |
_axviii, 430 p. : _bill. ; _c25 cm. |
||
| 440 | 0 | _aMcGraw-Hill series in electrical engineering | |
| 500 | _aIncludes index | ||
| 521 | _aAll. | ||
| 650 | 0 |
_aIntegrated circuits _xDesign and construction. |
|
| 852 |
_p24684 _90.00 _dBooks |
||
| 999 |
_c155935 _d155935 |
||