| 000 | 00992cam a22002774a 4500 | ||
|---|---|---|---|
| 001 | 0000051001 | ||
| 003 | 0001 | ||
| 008 | 120312s2012 ##############000#0#eng#d | ||
| 008 | 050822s2006 flua b 001 0 eng | ||
| 020 | _a0849335434 (alk. paper) | ||
| 020 | _a9780849335433 | ||
| 035 | _a(OCoLC)ocm61456530 | ||
| 040 |
_aDLC _cDLC _dYDX _dBAKER _dDLC |
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| 042 | _apcc | ||
| 082 | 0 | 0 |
_a621.3815 2 _222 |
| 084 |
_a621.3815 2 _bSCI |
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| 245 | 0 | 0 |
_aScientific wet process technology for innovative LSI/FPD manufacturing _h[Book] / _cedited by Tadahiro Ohmi. |
| 260 |
_aBoca Raton, FL : _bCRC/Taylor & Francis, _c2006. |
||
| 300 |
_a386 p. : _bill. ; _c27 cm. |
||
| 521 | _aAll. | ||
| 650 | 0 |
_aSemiconductors _xDesign and construction. |
|
| 650 | 0 |
_aSemiconductors _xCleaning. |
|
| 650 | 0 |
_aIntegrated circuits _xDesign and construction. |
|
| 700 | 1 |
_aOhmi, Tadahiro, _d1939- |
|
| 852 |
_p29999 _90.00 _dBooks |
||
| 999 |
_c150163 _d150163 |
||