Helbert, John N. <br/><br/>
Handbook of VLSI microlithography   principles, tools, technology and applications  [Book] 
John N. Helbert. 
 -  Jaico Publishing House New Delhi 
<br/><br/> All. 
<br/><br/><label>ISBN: </label>8179924750 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated Circuits--Very Large Scale Integration
<br/><br/><label>Dewey Class. No.: </label>621.395