Campbell, Stephen A. <br/><br/>
The science and engineering of microelectronic fabrication   [Book] 
Stephen A. Campbell. 
 - 2nd Ed. 
 -  Oxford University Press New York 
<br/><br/> All. 
<br/><br/><label>ISBN: </label>195136055 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Design & Construction
<br/><br/><label>Dewey Class. No.: </label>621.38152