Liu, Chang <br/><br/>
Foundations of MEMS  [Book]. 

 - 2nd 
 - New Delhi  Pearson  2012 
<br/><br/> All. 
<br/><br/><label>ISBN: </label>9788131764756 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Foundations of MEMS