Gad-el-Hak,Mohamed <br/><br/>
MEMS   Design and Fabrication.  [Book] 

 - 2nd 
 - Boca Raton  CRC/Taylor & Francis,  2006 
<br/><br/> All. 
<br/><br/><label>ISBN: </label>0849391385 
<br/><br/><label>Subjects--Topical Terms: </label><br/>MEMS: Design and Fabrication