Adams, Thomas M. <br/><br/>
Introductory MEMS   Fabrication and application.  [Book] 

 - New Delhi  Springer  2012 
<br/><br/> All. 
<br/><br/><label>ISBN: </label>9780387095103 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Introductory MEMS: Fabrication and application