Maluf,N <br/><br/>
An Introduction to Microelectromechanical Systems Engineering  [Book]. 

 - 2nd 
 -  Artech House 
<br/><br/> All. 
<br/><br/><label>ISBN: </label>1580535909 
<br/><br/><label>Subjects--Topical Terms: </label><br/>An Introduction to Microelectromechanical Systems Engineering