Campbell,S.A <br/><br/>
The Science and Engineering of Microelectronic Fabrication  [Book]. 

 - 2nd 
 - New York  Oxford  2009 
<br/><br/> All. 
<br/><br/><label>ISBN: </label>195136055 
<br/><br/><label>Subjects--Topical Terms: </label><br/>The Science and Engineering of Microelectronic Fabrication