Microcircuit Engineering 88 proceedings of the International Conference on Microlithography, September 20-22, 1988, Vienna, Austria / [Book] :
edited by F. Paschke, W. Fallmann and H. Löschner.
- New York, : Tokyo : New York, N.Y. U.S.A. : North-Holland ; OHM ; Distributors for the U.S. and Canada, Elsevier Science Pub. Co., 1989.
- 653 p. : ill. ; 27 cm.
- Microelectronic engineering, v. 9, no. 1/4. 0167-9317 ; .
Includes index Organized by the Erwin Schrödinger Association for Microsciences, Vienna, and by the Austrian Ministry for Science and Research.