Campbell, Stephen A.,  1954- <br/><br/>
The science and engineering of microelectronic fabrication  [Book] / 
Stephen A. Campbell. 
 - 2nd ed. 
 - New York :  Oxford University Press,  2001. 
 - xiv, 603 p. :  ill. ;  24 cm. 
 - The Oxford series in electrical and computer engineering .
<br/><br/> All. 
<br/><br/><label>ISBN: </label>0195136055 (hbk) 9780195136050 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Design and construction.
<br/><br/><label>Dewey Class. No.: </label>621.38152