Menz, W. <br/><br/>
Microsystem technology  [Book] / 
W. Menz, J. Mohr, O. Paul. 
 - Weinheim ;  New York :  Wiley-VCH,  2001. 
 - xii, 500 p. :  ill. ;  25 cm. 
<br/><br/> Index includes 
<br/><br/> All. 
<br/><br/><label>ISBN: </label>3527307877 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Technology.<br/>Engineering.
<br/><br/><label>Dewey Class. No.: </label>621.381